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Facilities

Real-time fault diagnosis of semiconductor handlers using multiple autoencoders

기간

2025/July, Incheon, South Korea

참가자

JuYoung Kim, Wonsup Lee, Junho Lee, Yeon June Kang

대회명

The 31st International Congress on Sound and Vibration

JuYoung Kim, Wonsup Lee, Junho Lee, Yeon June Kang, Real-time fault diagnosis of semiconductor handlers using multiple autoencoders, 31st International Congress on Sound and Vibration